Patent · US Active

Selection of wavelengths for integrated circuit optical metrology

US7474993B2 · kind B2 · utility

0Cited by

28References

20Claims

0Family size

Assignee

TIMBRE TECHNOLOGIES, INC. · US

Inventors

Srinivas Doddi · Fremont, US
Lawrence Lane · San Jose, US
Vi Vuong · Fremont, US
Michael Laughery · Orlando, US
Junwei Bao · Los Altos, US
Kelly Barry · Saratoga, US
Nickhil Jakatdar · Los Altos, US
Emmanuel Drege · San Jose, US

Key dates

Filing date	Apr 20, 2007
Grant date	Jan 6, 2009
Priority date	—
Expiry date	Apr 20, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Specific wavelengths to use in optical metrology of an integrated circuit can be selected using one or more selection criteria and termination criteria. Wavelengths are selected using the selection criteria, and the selection of wavelengths is iterated until the termination criteria are met.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.