Electronically programmable fuse having anode and link surrounded by low dielectric constant material
US7479689B2 · kind B2 · utility
5Cited by
1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2007 |
| Grant date | Jan 20, 2009 |
| Priority date | — |
| Expiry date | Feb 4, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronically programmable fuse (e-fuse) is disclosed. In one embodiment, the e-fuse includes a cathode surrounded only by silicon dioxide; an anode; and a polysilicon-silicide programmable link coupling the anode and the cathode, wherein the anode and the polysilicon-silicide programmable link are surrounded by a low dielectric constant (low-k) material on a top and a side thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.