Patent · US Active

Automated ellipsometer and the like systems

US7505134B1 · kind B1 · utility

11Cited by

34References

22Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Blaine D. Johs · Lincoln, US
Ping He · Lincoln, US
Martin M. Liphardt · Lincoln, US
Christopher A. Goeden · Lincoln, US
John A. Woollam · Lincoln, US
James D. Welch · Omaha, US

Key dates

Filing date	Apr 21, 2006
Grant date	Mar 17, 2009
Priority date	—
Expiry date	Apr 14, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/0693
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.