Patent · US Active

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths

US7508510B2 · kind B2 · utility

1Cited by

7References

20Claims

0Family size

Assignee

J.A. WOOLLAM CO., INC. · US

Inventors

Galen L. Pfeiffer · Lincoln, US
Martin M. Liphardt · Lincoln, US
Blaine D. Johs · Lincoln, US
Craig M. Herzinger · Lincoln, US
Christopher A. Goeden · Lincoln, US
Ping He · Lincoln, US
John A. Woollam · Lincoln, US
James D. Welch · Omaha, US

Key dates

Filing date	Dec 12, 2006
Grant date	Mar 24, 2009
Priority date	—
Expiry date	Sep 13, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzing data obtained at those wavelengths.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.