Chemical delivery apparatus for CVD or ALD
US7562672B2 · kind B2 · utility
8Cited by
17References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2006 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Aug 3, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/877
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An ampoule assembly is configured with a bypass line and valve to allow the purging of the lines and valves connected to the ampoule. The ampoule assembly, in one embodiment, includes an ampoule, an inlet line, an outlet line, and a bypass line connected between the inlet line and the outlet line, the bypass line having a shut-off valve disposed therein to fluidly couple or decouple the inlet line and the outlet line. The shut-off valve disposed in the bypass line may be remotely controllable. Also, additional remotely controllable shut-off valves may be provided in the inlet and the outlet lines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.