Inventor · San Francisco, CA, US

Schubert S. Chu

78Patents
9h-index
104Co-inventors
77Inventor score

Filing activity: Mar 30, 2006 → Dec 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US7780789B2 Vortex chamber lids for atomic layer deposition Electricity 427 Active
US9929055B2 Method to grow thin epitaxial films at low temperature Electricity 293 Active
US7850779B2 Apparatus and process for plasma-enhanced atomic layer deposition Electricity 51 Active
US7682946B2 Apparatus and process for plasma-enhanced atomic layer deposition Electricity 35 Active
US7585762B2 Vapor deposition processes for tantalum carbide nitride materials Electricity 20 Active
US7833358B2 Method of recovering valuable material from exhaust gas stream of a reaction chamber Emerging Cross-Sectional Technologies 16 Active
US9923081B1 Selective process for source and drain formation Electricity 15 Active
US8110489B2 Process for forming cobalt-containing materials Electricity 10 Active
US9032906B2 Apparatus and process for plasma-enhanced atomic layer deposition Electricity 9 Active
US7562672B2 Chemical delivery apparatus for CVD or ALD Emerging Cross-Sectional Technologies 8 Active
US9768013B2 Apparatus and method for selective deposition Electricity 7 Active
US10090147B2 Integrated system and method for source/drain engineering Electricity 6 Active
US7748400B2 Chemical delivery apparatus for CVD or ALD Emerging Cross-Sectional Technologies 5 Active
US7568495B2 Chemical delivery apparatus for CVD or ALD Emerging Cross-Sectional Technologies 5 Active
US9650726B2 Methods and apparatus for deposition processes Electricity 5 Active
US9530638B2 Method to grow thin epitaxial films at low temperature Electricity 4 Active
US8951478B2 Ampoule with a thermally conductive coating Chemistry; Metallurgy 4 Active
US11177144B2 Wafer spot heating with beam width modulation Performing Operations; Transporting 4 Active
US10062598B2 Thermal processing susceptor Chemistry; Metallurgy 4 Active
US8815724B2 Process for forming cobalt-containing materials Electricity 3 Active
US11021795B2 Multi zone spot heating in epi Electricity 3 Active
US11171023B2 Diode laser for wafer heating for EPI processes Electricity 3 Active
US9881790B2 Method to enhance growth rate for selective epitaxial growth Electricity 2 Active
US7832432B2 Chemical delivery apparatus for CVD or ALD Emerging Cross-Sectional Technologies 2 Active
US10930543B2 Thermal processing susceptor Chemistry; Metallurgy 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.