Integrated circuit comb capacitor
US7585722B2 · kind B2 · utility
6Cited by
5References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2006 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Dec 29, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention is directed to an integrated circuit comb capacitor with capacitor electrodes that have an increased capacitance between neighboring capacitor electrodes as compared with other interconnects and via contacts formed in the same metal wiring level and at the same pitches. The invention achieves a capacitor that minimizes capacitance tolerance and preserves symmetry in parasitic electrode-substrate capacitive coupling, without adversely affecting other interconnects and via contacts formed in the same wiring level, through the use of, at most, one additional noncritical, photomask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.