Patent · US Active

Mini-prober for TFT-LCD testing

US7602199B2 · kind B2 · utility

1Cited by

122References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Benjamin M. Johnston · Los Gatos, US
Sriram Krishnaswami · Saratoga, US
Hung T. Nguyen · Fremont, US
Matthias Brunner · Tauberbischofsheim, DE
Yong Liu · San Jose, US

Key dates

Filing date	May 9, 2007
Grant date	Oct 13, 2009
Priority date	—
Expiry date	May 9, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG09G3/006
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.