Benjamin M. Johnston
21Patents
4h-index
24Co-inventors
59Inventor score
Filing activity: Feb 12, 2004 → Jan 25, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7319335B2 | Configurable prober for TFT LCD array testing | Physics | 20 | Expired |
| US6833717B1 | Electron beam test system with integrated substrate transfer module | Physics | 17 | Expired |
| US7355418B2 | Configurable prober for TFT LCD array test | Physics | 7 | Expired |
| US7330021B2 | Integrated substrate transfer module | Physics | 4 | Expired |
| US7535238B2 | In-line electron beam test system | Electricity | 3 | Expired |
| US7746088B2 | In-line electron beam test system | Electricity | 3 | Active |
| US9927723B2 | Apparatus and methods for on-the-fly digital exposure image data modification | Physics | 2 | Active |
| US7919972B2 | Integrated substrate transfer module | Physics | 2 | Active |
| US7602199B2 | Mini-prober for TFT-LCD testing | Physics | 1 | Active |
| US7973546B2 | In-line electron beam test system | Electricity | 1 | Active |
| US7786742B2 | Prober for electronic device testing on large area substrates | Physics | 1 | Active |
| US10788762B2 | Dynamic cooling control for thermal stabilization for lithography system | Physics | 1 | Active |
| US10031427B2 | Methods and apparatus for vibration damping stage | Physics | 1 | Active |
| US9315900B2 | Isolation of microwave sources through bellows | Electricity | 1 | Active |
| US11009801B2 | Dynamic cooling control for thermal stabilization for lithography system | Physics | 0 | Active |
| US10036966B2 | Environmental control of systems for photolithography process | Physics | 0 | Active |
| US9820372B2 | Segmented antenna assembly | Electricity | 0 | Active |
| US10379450B2 | Apparatus and methods for on-the-fly digital exposure image data modification | Physics | 0 | Active |
| US12061422B2 | Method for fast loading substrates in a flat panel tool | Physics | 0 | Active |
| US7847566B2 | Configurable prober for TFT LCD array test | Physics | 0 | Active |
| US10901328B2 | Method for fast loading substrates in a flat panel tool | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.