Method of classifying defects using multiple inspection machines
US7602962B2 · kind B2 · utility
15Cited by
10References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2004 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Dec 29, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.