Inventor · Tokyo, JP

Hirohito Okuda

18Patents
9h-index
26Co-inventors
64Inventor score

Filing activity: Oct 6, 1999 → Sep 5, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7231079B2 Method and system for inspecting electronic circuit pattern Physics 24 Expired
US7170593B2 Method of reviewing detected defects Physics 17 Expired
US7602962B2 Method of classifying defects using multiple inspection machines Physics 15 Expired
US6855930B2 Defect inspection apparatus and defect inspection method Physics 13 Expired
US6622054B1 Method monitoring a quality of electronic circuits and its manufacturing condition and system for it Emerging Cross-Sectional Technologies 13 Expired
US7075077B2 Method of observing a specimen using a scanning electron microscope Electricity 12 Expired
US7424146B2 Defect inspection method Physics 11 Expired
US7583832B2 Method and its apparatus for classifying defects Physics 10 Expired
US7734082B2 Defect inspection method Physics 9 Active
US7521676B2 Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus Electricity 9 Active
US7756320B2 Defect classification using a logical equation for high stage classification Physics 7 Active
US7873205B2 Apparatus and method for classifying defects using multiple classification modules Physics 6 Active
US7034299B2 Transmission electron microscope system and method of inspecting a specimen using the same Electricity 5 Expired
US7205555B2 Defect inspection apparatus and defect inspection method Physics 4 Expired
US6965429B2 Method of reviewing detected defects Physics 4 Expired
US7181060B2 Defect inspection method Physics 4 Expired
US8111902B2 Method and apparatus for inspecting defects of circuit patterns Electricity 3 Active
US7420167B2 Apparatus and method for electron beam inspection with projection electron microscopy Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.