Hirohito Okuda
18Patents
9h-index
26Co-inventors
64Inventor score
Filing activity: Oct 6, 1999 → Sep 5, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7231079B2 | Method and system for inspecting electronic circuit pattern | Physics | 24 | Expired |
| US7170593B2 | Method of reviewing detected defects | Physics | 17 | Expired |
| US7602962B2 | Method of classifying defects using multiple inspection machines | Physics | 15 | Expired |
| US6855930B2 | Defect inspection apparatus and defect inspection method | Physics | 13 | Expired |
| US6622054B1 | Method monitoring a quality of electronic circuits and its manufacturing condition and system for it | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7075077B2 | Method of observing a specimen using a scanning electron microscope | Electricity | 12 | Expired |
| US7424146B2 | Defect inspection method | Physics | 11 | Expired |
| US7583832B2 | Method and its apparatus for classifying defects | Physics | 10 | Expired |
| US7734082B2 | Defect inspection method | Physics | 9 | Active |
| US7521676B2 | Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus | Electricity | 9 | Active |
| US7756320B2 | Defect classification using a logical equation for high stage classification | Physics | 7 | Active |
| US7873205B2 | Apparatus and method for classifying defects using multiple classification modules | Physics | 6 | Active |
| US7034299B2 | Transmission electron microscope system and method of inspecting a specimen using the same | Electricity | 5 | Expired |
| US7205555B2 | Defect inspection apparatus and defect inspection method | Physics | 4 | Expired |
| US6965429B2 | Method of reviewing detected defects | Physics | 4 | Expired |
| US7181060B2 | Defect inspection method | Physics | 4 | Expired |
| US8111902B2 | Method and apparatus for inspecting defects of circuit patterns | Electricity | 3 | Active |
| US7420167B2 | Apparatus and method for electron beam inspection with projection electron microscopy | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.