Patent · US Active

Illumination system for optical inspection

US7630069B2 · kind B2 · utility

18Cited by

41References

8Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Ron Naftali · Shoham, IL
Avishay Guetta · Rehovot, IL
Haim Feldman · Yafia, IL
Doron Shoham · Shoham, IL

Key dates

Filing date	Jan 23, 2006
Grant date	Dec 8, 2009
Priority date	—
Expiry date	Aug 19, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/005
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.