Catadioptric projection objective

US7697198B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• David Shafer · Fairfield, US
• Alexander Epple · Aalen, DE
• Aurelian Dodoc · Heidenheim an der Brenz, DE
• Wilhelm Ulrich · Aalen, DE
• Karl-Heinz Schuster · Oberkochen, DE

Key dates

• Filing date: Oct 15, 2004
• Grant date: Apr 13, 2010
• Expiry date: Feb 1, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70275
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.