Corrosion-resistant aluminum component having multi-layer coating
US7732056B2 · kind B2 · utility
18Cited by
29References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2005 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Jan 18, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/081
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of providing a corrosion-resistant coating on a surface of an aluminum component comprises anodizing the surface of the aluminum component to form an anodized aluminum oxide layer and sputter coating a sputtered layer on the anodized aluminum oxide layer. A coated aluminum component can be used in a substrate processing chamber and comprises an aluminum body, an anodized aluminum oxide layer formed on the aluminum body, and a sputtered layer comprising aluminum oxide on the anodized aluminum oxide layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.