Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
US7746471B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2007 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Nov 24, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0693
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substantially self-contained “on-board” material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.