Automated ellipsometer and the like systems
US7746472B1 · kind B1 · utility
6Cited by
31References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2008 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Mar 4, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0693
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.