Method and system for the examination of specimen

US7800062B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alex Goldenshtein · Nes Ziona, IL
• Radel Ben-Av · Rehovot, IL
• Asher Pearl · Rehovot, IL
• Igor Petrov · Holon, IL
• Nadav Haas · Kiryat Malachi, IL
• Pavel Adamec · Haar, DE
• Yaron Gold · Sderot, IL

Key dates

• Filing date: Aug 6, 2004
• Grant date: Sep 21, 2010
• Expiry date: Dec 9, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/281
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.