Scanning electron microscope
US7807966B2 · kind B2 · utility
1Cited by
4References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2008 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Mar 9, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2809
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope for digitally processing an image signal to secure the largest focal depth and the best resolution in accordance with the magnification for observation is disclosed. The angle of aperture of an optical system having a plurality of convergence lenses is changed by changing the convergence lenses and the hole diameter of a diaphragm. The angle α of aperture of the electron beam is changed in accordance with the visual field range corresponding to a single pixel, i.e. what is called the pixel size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.