Chemical delivery apparatus for CVD or ALD

US7832432B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Norman Nakashima · Lake Oswego, US
• Christophe Marcadal · Sunnyvale, US
• Seshadri Ganguli · Sunnyvale, US
• Paul F. Ma · Santa Clara, US
• Schubert S. Chu · San Francisco, US

Key dates

• Filing date: Jul 9, 2009
• Grant date: Nov 16, 2010
• Expiry date: Jul 9, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/877
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments described herein provide ampoule assemblies to contain, store, or dispense chemical precursors. In one embodiment, an ampoule assembly is provided which includes an ampoule containing a first material layer disposed on the outside of the ampoule and a second material layer disposed over the first material layer, wherein the first material layer is thermally more conductive than the second material layer, an inlet line in fluid communication with the ampoule and containing a first manual shut-off valve disposed therein, an outlet line in fluid communication with the ampoule and containing a second manual shut-off valve disposed therein, and a first bypass line connected between the inlet line and the outlet line. In some embodiments, the ampoule assembly may contain disconnect fittings. In other embodiments, the first bypass line has a shut-off valve disposed therein to fluidly couple or decouple the inlet line and the outlet line.