Polishing article with integrated window stripe

US7841925B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Gregory E. Menk · Pleasanton, US
• Peter McReynolds · San Mateo, US
• Erik S. Rondum · San Ramon, US
• Anand N. Iyer · Cupertino, US
• Gopalakrishna B. Prabhu · San Jose, US
• Garlen C. Leung · San Jose, US

Key dates

• Filing date: Jun 19, 2009
• Grant date: Nov 30, 2010
• Expiry date: Jun 19, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B24D11/001
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A polishing article includes a polishing layer having a polishing surface and a solid light-transmissive window in the polishing layer, the window having a first non-linear edge that extends along a first axis parallel to the polishing surface, the first non-linear edge including a plurality of projections and a plurality of recesses extending parallel to the polishing surface and disposed in an alternating pattern along the first axis.