Gopalakrishna B. Prabhu
29Patents
11h-index
74Co-inventors
78Inventor score
Filing activity: Oct 1, 1998 → Jul 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6132298A | Carrier head with edge control for chemical mechanical polishing | Performing Operations; Transporting | 78 | Expired |
| US6220942A | CMP platen with patterned surface | Performing Operations; Transporting | 47 | Expired |
| US6217426A | CMP polishing pad | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6361420B1 | Method of chemical mechanical polishing with edge control | Performing Operations; Transporting | 32 | Expired |
| US6575825B2 | CMP polishing pad | Emerging Cross-Sectional Technologies | 29 | Expired |
| US7160739B2 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Emerging Cross-Sectional Technologies | 29 | Expired |
| US7553214B2 | Polishing article with integrated window stripe | Performing Operations; Transporting | 16 | Active |
| US6220941A | Method of post CMP defect stability improvement | Performing Operations; Transporting | 16 | Expired |
| US7063597B2 | Polishing processes for shallow trench isolation substrates | Electricity | 15 | Expired |
| US6592438B2 | CMP platen with patterned surface | Emerging Cross-Sectional Technologies | 14 | Expired |
| US8388412B2 | Retaining ring with shaped profile | Emerging Cross-Sectional Technologies | 11 | Active |
| US8101451B1 | Method to form a device including an annealed lamina and having amorphous silicon on opposing faces | Emerging Cross-Sectional Technologies | 10 | Active |
| US7601050B2 | Polishing apparatus with grooved subpad | Performing Operations; Transporting | 10 | Active |
| US8070909B2 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Emerging Cross-Sectional Technologies | 8 | Active |
| US6677239B2 | Methods and compositions for chemical mechanical polishing | Electricity | 7 | Expired |
| US8173452B1 | Method to form a device by constructing a support element on a thin semiconductor lamina | Emerging Cross-Sectional Technologies | 6 | Active |
| US8231431B2 | Solar panel edge deletion module | Emerging Cross-Sectional Technologies | 5 | Active |
| US7179159B2 | Materials for chemical mechanical polishing | Performing Operations; Transporting | 5 | Expired |
| US8033895B2 | Retaining ring with shaped profile | Emerging Cross-Sectional Technologies | 4 | Active |
| US7908743B2 | Method for forming an electrical connection | Emerging Cross-Sectional Technologies | 3 | Active |
| US7429210B2 | Materials for chemical mechanical polishing | Performing Operations; Transporting | 3 | Active |
| US6558236B2 | Method and apparatus for chemical mechanical polishing | Performing Operations; Transporting | 2 | Expired |
| US8694145B2 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Emerging Cross-Sectional Technologies | 2 | Active |
| US7040966B2 | Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers | Electricity | 1 | Expired |
| US7841925B2 | Polishing article with integrated window stripe | Performing Operations; Transporting | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.