Inventor · Pleasanton, CA, US

Gregory E. Menk

32Patents
12h-index
65Co-inventors
84Inventor score

Filing activity: Aug 10, 1988 → Dec 8, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9873180B2 CMP pad construction with composite material properties using additive manufacturing processes Performing Operations; Transporting 37 Active
US9776361B2 Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles Performing Operations; Transporting 20 Active
US10384330B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 20 Active
US10593574B2 Techniques for combining CMP process tracking data with 3D printed CMP consumables Electricity 17 Active
US7553214B2 Polishing article with integrated window stripe Performing Operations; Transporting 16 Active
US10537974B2 CMP pad construction with composite material properties using additive manufacturing processes Performing Operations; Transporting 16 Active
US10875145B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 16 Active
US10821573B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 16 Active
US10322491B2 Printed chemical mechanical polishing pad Performing Operations; Transporting 15 Active
US7063597B2 Polishing processes for shallow trench isolation substrates Electricity 15 Expired
US10493691B2 Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles Performing Operations; Transporting 15 Active
US9138860B2 Closed-loop control for improved polishing pad profiles Performing Operations; Transporting 14 Active
US8439723B2 Chemical mechanical polisher with heater and method Performing Operations; Transporting 12 Active
US8388412B2 Retaining ring with shaped profile Emerging Cross-Sectional Technologies 11 Active
US7601050B2 Polishing apparatus with grooved subpad Performing Operations; Transporting 10 Active
US4994868A Heterojunction confined channel FET Electricity 8 Expired
US4962050A GaAs FET manufacturing process employing channel confining layers Emerging Cross-Sectional Technologies 8 Expired
US4948752A Method of making sagfets on buffer layers Emerging Cross-Sectional Technologies 7 Expired
US4918493A Sagfet with buffer layers Electricity 5 Expired
US7179159B2 Materials for chemical mechanical polishing Performing Operations; Transporting 5 Expired
US8033895B2 Retaining ring with shaped profile Emerging Cross-Sectional Technologies 4 Active
US7429210B2 Materials for chemical mechanical polishing Performing Operations; Transporting 3 Active
US11724362B2 Polishing pads produced by an additive manufacturing process Performing Operations; Transporting 3 Active
US8337279B2 Closed-loop control for effective pad conditioning Performing Operations; Transporting 2 Active
US8758085B2 Method for compensation of variability in chemical mechanical polishing consumables Performing Operations; Transporting 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.