Multiple zone carrier head with flexible membrane
US7842158B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2007 |
| Grant date | Nov 30, 2010 |
| Priority date | — |
| Expiry date | Sep 1, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.