Tsz-Sin Siu
8Patents
5h-index
5Co-inventors
52Inventor score
Filing activity: Mar 26, 2004 → Sep 13, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7255771B2 | Multiple zone carrier head with flexible membrane | Performing Operations; Transporting | 58 | Expired |
| US8088299B2 | Multiple zone carrier head with flexible membrane | Performing Operations; Transporting | 19 | Active |
| US7081042B2 | Substrate removal from polishing tool | Performing Operations; Transporting | 16 | Expired |
| US8454413B2 | Multi-chamber carrier head with a textured membrane | Performing Operations; Transporting | 6 | Active |
| US8808062B2 | Multi-chamber carrier head with a textured membrane | Performing Operations; Transporting | 5 | Active |
| US7842158B2 | Multiple zone carrier head with flexible membrane | Performing Operations; Transporting | 4 | Active |
| US10702971B2 | Textured membrane for a multi-chamber carrier head | Performing Operations; Transporting | 2 | Active |
| US9452505B2 | Textured membrane for a multi-chamber carrier head | Performing Operations; Transporting | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.