Electric charged particle beam microscope and microscopy
US7863564B2 · kind B2 · utility
6Cited by
7References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 28, 2008 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | Jun 26, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.