Catadioptric projection objective

US7869122B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• David Shafer · Fairfield, US
• Wilhelm Ulrich · Aalen, DE
• Aurelian Dodoc · Heidenheim an der Brenz, DE
• Rudolf Von Buenau · Jena, DE
• Hans-Juergen Mann · Oberkochen, DE
• Alexander Epple · Aalen, DE

Key dates

• Filing date: Apr 9, 2008
• Grant date: Jan 11, 2011
• Expiry date: Apr 9, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;