Patent · US Active

Electro-chemical processor

US7909967B2 · kind B2 · utility

0Cited by

5References

17Claims

0Family size

Assignee

Semitool, Inc. · US

Inventors

Daniel J. Woodruff · Kalispell, US
Paul R. McHugh · Kalispell, US
Gregory J. Wilson · Kalispell, US
Kyle M. Hanson · Kalispell, US
Erik Lund · Bellevue, US
Steven L. Peace · Whitefish, US

Key dates

Filing date	Jul 13, 2006
Grant date	Mar 22, 2011
Priority date	—
Expiry date	Dec 28, 2029

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC25F7/00
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An electro-chemical processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The first seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The first electrode may move along with the first seal. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.