Electro-chemical processor

US7927469B2 · kind B2 · utility

Assignee

• Semitool, Inc. · US

Inventors

• Nigel Stewart · Burwell, GB
• Daniel J. Woodruff · Kalispell, US
• Paul R. McHugh · Kalispell, US
• Gregory J. Wilson · Kalispell, US
• Kyle M. Hanson · Kalispell, US
• Erik Lund · Bellevue, US
• Steven L. Peace · Whitefish, US

Key dates

• Filing date: Aug 25, 2006
• Grant date: Apr 19, 2011
• Expiry date: Feb 17, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67126
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A processor for making porous silicon or processing other substrates has first and second chamber assemblies. The first and second chamber assemblies include first and second seals for sealing against a wafer, and first and second electrodes, respectively. The second seal is moveable towards and away from a wafer in the processor, to move between a wafer load/unload position, and a wafer process position. The second electrode may move with the second seal. A light source shines light onto the first side of the wafer. The processor may be pivotable from a substantially horizontal orientation, for loading and unloading a wafer, to a substantially vertical orientation, for processing a wafer.