Method and apparatus for verifying proper substrate positioning
US7933009B2 · kind B2 · utility
8Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2007 |
| Grant date | Apr 26, 2011 |
| Priority date | — |
| Expiry date | Apr 13, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments of methods and apparatus for detecting the proper position of a substrate in a chamber are provided herein. In some embodiments, a substrate position detection apparatus includes a substrate support having a plurality of lift pins for supporting a substrate in an elevated position thereover; a light source for directing a beam of light upon a reflective upper surface of the substrate; and a light sensor for detecting a reflected beam of light from the upper surface of the substrate upon the substrate being aligned in a predetermined elevated position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.