Patent · US Active

Method for manufacturing semiconductor device comprising SOI transistors and bulk transistors

US7955937B2 · kind B2 · utility

5Cited by
10References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 17, 2006
Grant dateJun 7, 2011
Priority date
Expiry dateOct 10, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D87/00
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

By forming bulk-like transistors in sensitive RAM areas of otherwise SOI-based CMOS circuits, a significant savings in valuable chip area may be achieved since the RAM areas may be formed on the basis of a bulk transistor configuration, thereby eliminating hysteresis effects that may typically be taken into consideration by providing transistors of increased transistor width or by providing body ties. Hence, the benefit of high switching speed may be maintained in speed-critical circuitry, such as CPU cores, while at the same time the RAM circuit may be formed in a highly space-efficient manner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.