Ultraviolet reflector with coolant gas holes and method
US7964858B2 · kind B2 · utility
11Cited by
8References
44Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2008 |
| Grant date | Jun 21, 2011 |
| Priority date | — |
| Expiry date | Jun 4, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a longitudinal strip extending the length of the ultraviolet lamp. The longitudinal strip has a curved reflective surface and comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.