Patent · US Active

Method and system for defect detection

US7970201B2 · kind B2 · utility

0Cited by

6References

43Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Michael Ben-Yishay · Netanya, IL
Ophir Gvirtzer · Rehovot, IL

Key dates

Filing date	Jul 31, 2007
Grant date	Jun 28, 2011
Priority date	—
Expiry date	Apr 27, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG06V10/757
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.