Methods of making crystalline tantalum pentoxide
US8012532B2 · kind B2 · utility
1Cited by
31References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2007 |
| Grant date | Sep 6, 2011 |
| Priority date | — |
| Expiry date | Jan 21, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/694
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
There is disclosed a method of forming crystalline tantalum pentoxide on a ruthenium-containing material having an oxygen-containing surface wherein the oxygen-containing surface is contacted with a treating composition, such as water, to remove at least some oxygen. Crystalline tantalum pentoxide is formed on at least a portion of the surface having reduced oxygen content.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.