Thermal field emission cathode
US8022609B2 · kind B2 · utility
0Cited by
4References
21Claims
0Family size
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Key dates
| Filing date | Jun 24, 2008 |
| Grant date | Sep 20, 2011 |
| Priority date | — |
| Expiry date | Jul 12, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06375
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.