Patent · US Active

Low resistance peripheral local interconnect contacts with selective wet strip of titanium

US8026542B2 · kind B2 · utility

1Cited by
17References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 29, 2006
Grant dateSep 27, 2011
Priority date—
Expiry dateAug 29, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Methods for forming memory devices and integrated circuitry, for example, DRAM circuitry, structures and devices resulting from such methods, and systems that incorporate the devices are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.