Methods and systems for determining a position of inspection data in design data space
US8041103B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2007 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Aug 17, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.