Patent · US Active

Silicon MEMS resonator devices and methods

US8049490B2 · kind B2 · utility

0Cited by

7References

11Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Markus Loehndorf · Munich, DE
Wolfgang Raberg · Sauerlach, DE
Florian Schoen · Altdorf, DE

Key dates

Filing date	Aug 19, 2008
Grant date	Nov 1, 2011
Priority date	—
Expiry date	Dec 29, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02496
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Embodiments of the invention are related to MEMS devices and methods. In one embodiment, a MEMS device includes a resonator element comprising a magnetic portion having a fixed magnetization, and at least one sensor element comprising a magnetoresistive portion, wherein a magnetization and a resistivity of the magnetoresistive portion vary according to a proximity of the magnetic portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.