Gettering/stop layer for prevention of reduction of insulating oxide in metal-insulator-metal device
US8093698B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2006 |
| Grant date | Jan 10, 2012 |
| Priority date | — |
| Expiry date | Aug 5, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electronic device includes a first electrode, a second electrode and an insulating layer between the first and second electrodes, which insulating layer may be susceptible to reduction by H2. A gettering layer is provided on and in contact with the first electrode, the gettering layer acting as a protective layer for substantially avoiding reduction of the insulating layer by capturing and immobilizing H2. A glue layer may be provided between the gettering layer and first electrode. An additional gettering layer may be provided on and in contact with the second electrode, and a glue layer may be provided between the second electrode and additional gettering layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.