Substrate matrix to decouple tool and process effects
US8142966B2 · kind B2 · utility
14Cited by
5References
20Claims
0Family size
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Key dates
| Filing date | May 20, 2009 |
| Grant date | Mar 27, 2012 |
| Priority date | — |
| Expiry date | May 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method of characterizing a process by selecting the process to characterize, selecting a parameter of the process to characterize, determining values of the parameter to use in a test matrix, specifying an eccentricity for the test matrix, selecting test structures to be created in cells on a substrate, processing the substrate through the process using in each cell the value of the parameter as determined by the eccentric test matrix, measuring a property of the test structures in the cells, and developing a correlation between the parameter and the property.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.