Use of infrared camera for real-time temperature monitoring and control
US8150242B2 · kind B2 · utility
5Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2008 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Dec 30, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.