Inventor · Leatherhead, GB

Stephen Moffatt

86Patents
11h-index
83Co-inventors
81Inventor score

Filing activity: May 13, 1987 → Jan 19, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8404499B2 LED substrate processing Electricity 459 Active
US5969366A Ion implanter with post mass selection deceleration Electricity 40 Expired
US8148663B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 32 Active
US5883391A Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process Electricity 30 Expired
US6100536A Electron flood apparatus for neutralizing charge build-up on a substrate during ion implantation Electricity 30 Expired
US7800081B2 Pulse train annealing method and apparatus Electricity 25 Active
USD959490S1 Display screen or portion thereof with graphical user interface General 23 Active
US4825087A System and methods for wafer charge reduction for ion implantation Electricity 22 Expired
US7075165B2 Embedded waveguide detectors Emerging Cross-Sectional Technologies 18 Expired
US8829392B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 15 Active
US7151881B2 Impurity-based waveguide detectors Emerging Cross-Sectional Technologies 14 Expired
US6909588B2 Substrate holder for retaining a substrate within a processing chamber Electricity 10 Expired
US6515408B1 Ion beam apparatus and a method for neutralizing space charge in an ion beam Electricity 10 Expired
US7372690B2 Substrate holder which is self-adjusting for substrate deformation Electricity 8 Expired
US7795816B2 High speed phase scrambling of a coherent beam using plasma Electricity 7 Active
US6359286B1 Method and apparatus for neutralizing space charge in an ion beam Electricity 7 Expired
US7745309B2 Methods for surface activation by plasma immersion ion implantation process utilized in silicon-on-insulator structure Electricity 5 Active
US7569463B2 Method of thermal processing structures formed on a substrate Electricity 5 Active
US8150242B2 Use of infrared camera for real-time temperature monitoring and control Electricity 5 Active
US9018110B2 Apparatus and methods for microwave processing of semiconductor substrates Electricity 5 Active
US8518838B2 Method of thermal processing structures formed on a substrate Electricity 5 Active
US9499909B2 Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit Electricity 4 Active
US9123527B2 Apparatus and methods for pulsed photo-excited deposition and etch Emerging Cross-Sectional Technologies 4 Active
US8785815B2 Aperture control of thermal processing radiation Physics 4 Active
US9908200B2 Apparatus and method of improving beam shaping and beam homogenization Performing Operations; Transporting 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.