Method and apparatus for dispatching workpieces to tools based on processing and performance history

US8155770B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Robert Barlovic · Dresden, DE
• Uwe Schulze · Dresden, DE
• Jan Raebiger · Dresden, DE
• Joerg Weigang · Dresden, DE
• Jens Busch · Radebeul, DE
• Rolf Seltmann · Dresden, DE

Key dates

• Filing date: Mar 31, 2009
• Grant date: Apr 10, 2012
• Expiry date: Apr 2, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T483/1712
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Metrology data associated with a plurality of workpieces processed at a selected operation in the process flow including a plurality of operations is retrieved. A processing context associated with each of the workpieces is determined. The processing context identifies at least one previous tool used to perform an operation on the associated workpiece prior to the selected operation. A plurality of performance metrics is determined for a plurality of tools capable of performing the selected operation based on the metrology data. Each performance metric is associated with a particular tool and a particular processing context. A set of the performance metrics is identified for the plurality of tools having a processing context matching a processing context of a selected workpiece awaiting performance of the selected operation. The selected workpiece is dispatched for processing in a selected one of the plurality of tools based on the set of performance metrics.