Scanning microscopy using inhomogeneous polarization

US8228601B2 · kind B2 · utility

Assignee

• Applied Materials Israel Ltd. · IL

Inventors

• Doron Meshulach · Ramat Gan, IL
• Kobi Kan · Givatayim, IL
• Haim Feldman · Yafia, IL
• Ido Dolev · Rehovot, IL
• Ori Sarfaty · Ramat HaSharon, IL

Key dates

• Filing date: May 12, 2009
• Grant date: Jul 24, 2012
• Expiry date: Aug 20, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0068
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.