Electrolytic process using cation permeable barrier

US8236159B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Rajesh Baskaran · Dracut, US
• Robert W. Batz, Jr. · Kalispell, US
• Bioh Kim · Milford, US
• Tom Ritzdorf · Lolo, US
• John L. Klocke · Kalispell, US
• Kyle M. Hanson · Kalispell, US

Key dates

• Filing date: Apr 28, 2006
• Grant date: Aug 7, 2012
• Expiry date: Oct 13, 2029

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D21/12
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.