Chuck with triaxial construction

US8240650B2 · kind B2 · utility

Assignee

• Cascade Microtech, Inc. · US

Inventors

• Michael Teich · Mannheim, DE
• Karsten Stoll · Wilthen, DE
• Axel Schmidt · Munich, DE
• Stojan Kanev · Sacka, DE
• Jorg Kiesewetter · Thiendorf, DE

Key dates

• Filing date: Mar 14, 2008
• Grant date: Aug 14, 2012
• Expiry date: Apr 21, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T279/18
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.