Lift pin for substrate processing
US8256754B2 · kind B2 · utility
4Cited by
20References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2007 |
| Grant date | Sep 4, 2012 |
| Priority date | — |
| Expiry date | Apr 14, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A lift pin is provided for manipulating a substrate above a support surface of a substrate support and uniformly transferring heat from the substrate support to the substrate. The lift pin includes a pin shaft. The pin shaft includes a cross-section having at least three equal edges and round corners configured alternatively. A pin head is an end portion of the pin shaft, wherein the pin head has a convex support surface larger than the cross-section of the pin shaft. A flat portion is disposed on a central area of the convex support surface for directly contacting the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.