Patent · US Active

Probe station for testing semiconductor substrates and comprising EMI shielding

US8278951B2 · kind B2 · utility

5Cited by

7References

12Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Stojan Kanev · Sacka, DE
Hans-Jurgen Fleischer · Großenhain, DE
Stefan Kreissig · Drebach, DE
Karsten Stoll · Wilthen, DE
Axel Schmidt · Munich, DE
Andreas Kittlaus · Bad Liebenwerda, DE

Key dates

Filing date	Nov 15, 2007
Grant date	Oct 2, 2012
Priority date	—
Expiry date	Dec 6, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/18
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.