Measuring in-situ UV intensity in UV cure tool

US8283644B2 · kind B2 · utility

Assignee

• Novellus Systems, Inc. · US

Inventors

• Eugene Smargiassi · Tualatin, US
• Boaz Kenane · Portland, US
• James Lee · Happy Valley, US
• Xiaolan Chen · Beaverton, US

Key dates

• Filing date: Mar 23, 2011
• Grant date: Oct 9, 2012
• Expiry date: Apr 7, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67248
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Provided are improved apparatus and methods for radiative treatment. In some embodiments, a semiconductor processing apparatus for radiative cure includes a process chamber and a radiation assembly external to the process chamber. The radiation assembly transmits radiation into the chamber on a substrate holder through a chamber window. A radiation detector measures radiation intensity from time to time. The assembly includes a gas inlet and exhaust operable to flow a radiation-activatable cooling gas through the radiation assembly.