Compact scanning electron microscope
US8309921B2 · kind B2 · utility
13Cited by
61References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2011 |
| Grant date | Nov 13, 2012 |
| Priority date | — |
| Expiry date | Feb 1, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.