Steven Berger
19Patents
11h-index
22Co-inventors
72Inventor score
Filing activity: Aug 7, 1989 → May 5, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5260151A | Device manufacture involving step-and-scan delineation | Electricity | 80 | Expired |
| US5079112A | Device manufacture involving lithographic processing | Emerging Cross-Sectional Technologies | 54 | Expired |
| US5130213A | Device manufacture involving lithographic processing | Electricity | 47 | Expired |
| US5258246A | Device manufacture involving lithographic processing | Electricity | 35 | Expired |
| US7504182B2 | Photolithography mask repair | Physics | 29 | Active |
| US5279925A | Projection electron lithographic procedure | Emerging Cross-Sectional Technologies | 26 | Expired |
| US5316879A | Sub-micron device fabrication using multiple aperture filter | Performing Operations; Transporting | 17 | Expired |
| US5701014A | Projection lithography apparatus | Electricity | 16 | Expired |
| US7906762B2 | Compact scanning electron microscope | Electricity | 15 | Active |
| US8309921B2 | Compact scanning electron microscope | Electricity | 13 | Active |
| US5382498A | Processes for electron lithography | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5376505A | Device fabrication entailing submicron imaging | Performing Operations; Transporting | 10 | Expired |
| US7662524B2 | Photolithography mask repair | Physics | 8 | Active |
| US5561008A | Process for device fabrication using projection lithography and an apparatus therefor | Electricity | 7 | Expired |
| US7727681B2 | Electron beam processing for mask repair | Electricity | 6 | Active |
| USRE36964E | Device manufacture involving lithographic processing | General | 3 | Expired |
| US9025018B2 | User interface for an electron microscope | Electricity | 2 | Active |
| US9865427B2 | User interface for an electron microscope | Electricity | 1 | Active |
| US7917349B2 | Combined hardware and software instrument simulator for use as a teaching aid | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.